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SAW properties of LiNbO3 and LiTaO3 films grown by pulsed laser deposition

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6 Author(s)
Shibata, Yoshihiko ; Central Lab., Asahi Chem. Ind. Co. Ltd., Shizuoka, Japan ; Kuze, N. ; Matsui, Masahiro ; Kaya, K.
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LiNbO3 and LiTaO3 films are deposited on sapphire and AlN/sapphire substrates using Ar-F excimer laser ablation. The deposition and structure of the films are investigated systematically. The structure of the films is analyzed by X-ray pole figure, high-resolution X-ray diffraction and transmission electron microscopy. The results of these analysis indicate that deposited films are extremely high-quality epitaxial films. As-grown LiNbO3 and LiTaO3 films are sufficiently piezoelectric to fabricate SAW devices. The experimental data of SAW velocity (Vs) and electromechanical coupling coefficients (k2) almost coincide with the calculated data

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996