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Overall equipment effectiveness (OEE) and cost measurement [semiconductor manufacturing]

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2 Author(s)
Konopka, J. ; SEMATECH, Austin, TX, USA ; Trybula, W.

Total Productive Maintenance (TPM) has provided a new perspective on semiconductor manufacturing. The need to improve performance requires more focus than ever on the TPM metric of Overall Equipment Effectiveness (OEE). Investigation of this data with a productivity analysis framework called the Capacity Utilization Bottleneck Efficiency System (CUBES) identifies and prioritizes productivity inefficiencies with their accompanying tool capacity decreases. A proposal for an extension of the CUBES to reflect cost measurement associated with these inefficiencies is discussed

Published in:

Electronics Manufacturing Technology Symposium, 1996., Nineteenth IEEE/CPMT

Date of Conference:

14-16 Oct 1996