Cart (Loading....) | Create Account
Close category search window

Design and Performance of MEMS Multifunction Optical Device Using a Combined In-Plane and Out-of-Plane Motion of Dual-Slope Mirror

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Chen, Q.H. ; Inst. of Microelectron., Peking Univ., Beijing, China ; Wu, W.G. ; Wang, Z.Q. ; Yan, G.Z.
more authors

A reflection-type MEMS multifunction-integrated optical device using the combined in-plane and out-of-plane motion of a dual-slope mirror is proposed. The motion of the mirrors results in the corresponding optical axis offsets in the transmitting and receiving optical signals, which can enable the device with variable optical power splitting, optical switching and variable optical attenuating functions. The optical models for splitting and attenuating are presented, respectively. The electro-mechanical characteristics of the device are also investigated. Measurements of the fabricated devices show that the switching times is less than 9 ms. The excess loss of the device is less than 3 dB and the controllable attenuation range is up to 39 dB, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation and splitting range.

Published in:

Lightwave Technology, Journal of  (Volume:28 ,  Issue: 24 )

Date of Publication:

Dec.15, 2010

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.