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Design and fabrication of a high fill-factor micro-mirror array

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3 Author(s)
Sihua Li ; State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China ; Jing Xu ; Yaming Wu

In this paper, we propose and demonstrate a novel micro-mirror array. The Micro-mirror structure with terraced electrodes was simulated with the aid of CoventorWare and the simulation results show that the micro-mirror can obtain a required tilted angle. Si-Si bonding technology is used for fabricating the Micro-mirror array and an array with high Fill factor of 97% has been achieved.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Date of Conference:

20-23 Jan. 2010

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