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The micro-structure and optical properties of Mn-doped ZnO thin film fabricated by sol-gel technique

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6 Author(s)
Xiu-Qin Wang ; Center of Low-dimension Materials, Micro/Nano Device and System, Jiangsu Polytechnic University Changzhou, 213164, P. R. China ; Ning-Yi Yuan ; Gu-Qiao Ding ; Bao Kan
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We synthesized undoped and Mn-doped ZnO films on glass substrates using the sol-gel technique. The micro-structure, morphology and optical properties of ZnO films were studied by using X-ray diffraction, Atomic Force Microscope and UV-visible transmission spectra. After annealed at a temperature lower than 550°C by Rapid Thermal Processing (RTP), all the ZnO films are polycrystalline with a hexagonal wurtzite structure. For Mn-doped ZnO films, although no peak corresponding to manganese oxide is observed in XRD spectrums, the lattice constants of the films become larger and the optical band-gaps increase with the increase of annealing temperature, which is different from the result of un-doped ZnO films. These measurements indicate that Mn2+ has substituted for Zn2+ in the films even annealed at a temperature as low as 300°C.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Date of Conference:

20-23 Jan. 2010