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Low temperature synthesis and field emission of carbon nanotubes using radio frequency plasma enhanced CVD

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3 Author(s)
Liu Yong-xiang ; Sch. of Electr. Eng., Xian Jiaotong Univ., Xian, China ; Liu Jun-hua ; Zhu Chang-chun

Carbon nanotubes (CNTs) on a glass substrate at a dramatic low temperature was obtained by a radio frequency plasma enhanced thermal chemical vapor deposition. Nickel film was heated and activated at 450°C with 2400 W rf plasma power, the deposition of the CNTs was performed for 60 minutes with 600 W, 1500 W and 2400 W rf plasma power. The diameters of the CNTs obtained are from 8 to 40 nm and the lengths are about over 1.0 um. SEM micrographs show the lower synthesis plasma power can do better for the CNTs synthesis than the exorbitant rf plasma, the Raman spectra and Field emission properties proved this result. The field emission of the film shows the turn-on emission threshold field is 1.17 V/um at an emission current density of 1 uA/cm. At this temperature, the glass did not exhibit deformation; electron emission sufficient for flat panel displays is an important progress in the integrated progress of glass sealed field emission displays.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on

Date of Conference:

20-23 Jan. 2010

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