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Special Issue on HiPIMS and High Power Glow Discharge

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2 Author(s)
Yukimura, K. ; National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan ; Ehiasarian, A. P.

This special issue focuses on high-power impulse magnetron sputtering (HiPIMS) technology. Twelve papers are included in this special issue.

Published in:

Plasma Science, IEEE Transactions on  (Volume:38 ,  Issue: 11 )