Skip to Main Content
The research and development on a novel capacitive pressure sensor with an elastic pressure-sensitive element are presented in this paper. As a coaxial cylinder capacitor converter, it uses a circuit cylinder as its stationary anode and the piezo gauge's shell as its moveable cathode with the electrode distance of 0.5 mm. The device's principle and structure are given, and its mechanical characteristics are theoretically simulated by using the finite element software ANSYS. The read-out circuitry was developed. Various physical properties were experimentally tested. Results show that its capacitance is approximately linear to the subjected pressure. Its sensitivity is 0.0099 pF/Mpa, pressure measuring rang is 0-600 Mpa, By using the sensor's shell as its elastic sensitive element, its volume is reduced and its applications are increased, thus it can be used to measure the chamber pressures of various different caliber guns. In addition, its lower cost is helpful to promoting its applications.