By Topic

Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Robert Neal Dean ; Department of Electrical and Computer Engineering, Auburn University, Auburn, AL , USA ; Abby Anderson ; Stanley J. Reeves ; George T. Flowers
more authors

Many microelectromechanical systems (MEMS) devices possess charged capacitor structures where the suspension system allows relative electrode motion due to internal or external stimuli. When such a device is subjected to external mechanical vibrations present in a harsh operating environment, unwanted movement between the capacitor plates can generate a noise current which is injected into the connected circuitry. This paper analyzes this phenomenon and presents a model for the dynamics of a MEMS device with capacitive plates experiencing relative motion due to external stimuli. A Fourier series expansion of the current is developed to characterize the frequency content of the signal in closed form for a given vibration frequency, and simulation and experimental results are presented.

Published in:

IEEE Transactions on Industrial Electronics  (Volume:58 ,  Issue: 7 )