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A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers

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6 Author(s)
Hongzhi Sun ; Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA ; Deyou Fang ; Kemiao Jia ; Maarouf, F.
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This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metal-oxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 μ g/√Hz in the x - and y -axis and 130 μ g/√Hz in the z -axis, and the power consumption is about 1 mW per axis.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 4 )

Date of Publication:

April 2011

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