By Topic

A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Hongzhi Sun ; Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA ; Deyou Fang ; Kemiao Jia ; Maarouf, F.
more authors

This paper reports a novel dual-chopper amplifier (DCA) and its application to monolithic complementary metal-oxide semiconductor-microelectromechanical systems accelerometers. The DCA design minimizes the power consumption and noise by chopping the sensing signals at two clocks. The first clock is a high frequency for removing the flicker noise while the second clock is a significantly lower frequency to keep the unit gain bandwidth low. A monolithic three-axis accelerometer integrated with the DCA on the same chip has been successfully fabricated using a post-CMOS micromachining process. The measured noise floors are 40 μ g/√Hz in the x - and y -axis and 130 μ g/√Hz in the z -axis, and the power consumption is about 1 mW per axis.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 4 )