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IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings

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The following topics were covered: computer integrated manufacturing; maximizing equipment productivity; inline inspection for defect reduction; methods for cycle time reduction; process improvement methodologies; international perspective; manufacturing cost reduction techniques; advanced processing-thin films/photo; defect reduction in equipment and processes; advanced processing-etch; advanced metrology; advanced process control; yield enhancement techniques; human resources and partnering issues

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996

Date of Conference:

12-14 Nov. 1996

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