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Real-time process monitoring [semiconductor manufacturing line]

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4 Author(s)
Bunkofske, R.J. ; IBM Microelectron. Div., Essex Junction, VT, USA ; Pascoe, N.T. ; Colt, J.Z. ; Smit, M.W.

This paper discusses the building, installation and integration of a data acquisition and analysis system in a semiconductor manufacturing line known as the real time process monitoring system (RTPM). It describes how it has been integrated with the site logistics system, the statistical process control system, and the characterization data base to provide improved process control, increased tool availability, and enhanced yield learning

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996

Date of Conference:

12-14 Nov 1996

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