Cart (Loading....) | Create Account
Close category search window
 

Optical characterization of TiN thin films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
McGahan, William A. ; Nanometrics Inc., Sunnyvale, CA, USA ; Spady, B.R. ; Iacoponi, J.A. ; Williams, J.D.

In this work we demonstrate the combined use of spectroscopic ellipsometry (performed from 420-720 nm at 65° angle of incidence) and spectroscopic reflectometry (performed from 200-800 nm at normal incidence) for the characterization of thin TiN films deposited on thick oxide films on silicon. By simultaneously analyzing both reflectance and ellipsometric spectra acquired from the same physical location on the sample surface we are able to precisely determine both the TiN and oxide film thicknesses, as well as the optical constants of the TiN film. The key to this analysis is the use of the Lorentz oscillator dispersion model to parameterize the optical constants of the TiN thin film such that these optical constants can be varied in the analysis by varying a relatively small number of parameters in the Lorentz oscillator dispersion model

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996

Date of Conference:

12-14 Nov 1996

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.