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Design of dual-axis accelerometer with CMOS-MEMS

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2 Author(s)
Tsung-Chi Kuo ; Grad. Inst. of Commun. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Jean-Fu Kiang

A dual-axis accelerometer with chopper-stabilized circuit is designed and implemented using the TSMC 0.18 μm 1P6M CMOS process. The acceleration of a proof mass is detected by measuring the capacitance change of the capacitor bank linked to mass via springs.

Published in:

Applications of Electromagnetism and Student Innovation Competition Awards (AEM2C), 2010 International Conference on

Date of Conference:

11-13 Aug. 2010