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Controlled growth and surface morphology evolution of m-oriented GaN faceted-domains on SiO2-patterned m-plane sapphire substrates

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2 Author(s)
Seo, Yeonwoo ; Department of Physics and Research Institute for Basic Sciences, Kyung Hee University, 1 Hoegi-dong Dongdaemun-gu, Seoul 130-701, Republic of Korea ; Kim, Chinkyo

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m-oriented GaN faceted-domains were grown on SiO2-patterned m-plane sapphire substrates with no low-temperature-grown buffer layers, and their surface morphology evolution was investigated. The preferred crystallographic orientations of GaN domains are found to be sensitively influenced by substrate temperature. The growth rate of m-oriented GaN faceted-domains along the c-direction is found to be significantly suppressed after filling up the circular-shaped window regions. Our simple model calculation reveals that this can be explained by the minimization of surface energy increment per volume increment, and that the growth along the c-direction is energetically not favored until the domain reaches a critical size.

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Applied Physics Letters  (Volume:97 ,  Issue: 10 )