By Topic

Titanium nitride films for ultrasensitive microresonator detectors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

13 Author(s)
Leduc, Henry G. ; Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California 91109, USA ; Bumble, B. ; Day, Peter K. ; Eom, Byeong Ho
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.3480420 

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors for the following reasons: (a) the critical temperature varies with composition (0<Tc<5 K); (b) the normal-state resistivity is large, ρn∼100 μΩ cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and (c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Qi>107) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10–200 μs. TiN microresonators should therefore reach sensitivities well below 10-19 WHz-1/2.

Published in:

Applied Physics Letters  (Volume:97 ,  Issue: 10 )