Properties of Pt/Cr layers due to fabrication conditions and micro hot-plate thermal characteristics [gas sensors]

We studied the electrical and structural properties of Pt/Cr layers to fabricate the micro hot-plate for the first time. Increasing the Cr layer thickness, the sheet resistance decreased greatly. The Pt/Cr layer sheet resistance is not affected by the Cr layer thickness. When we annealed the Pt/Cr layer in Ar ambient varying the temperature from 500/spl deg/C to 700/spl deg/C, the sheet resistance varied from 2.026 /spl Omega///spl square/ to 0.6317 /spl Omega///spl square/. We analyzed the Pt/Cr layer properties according to the annealing conditions by XRD and AES depth profiles. We fabricated the micro hot-plate using the Pt/Cr layer by micromachining technology and measured the thermal characteristics by an IR thermo-vision system. The micro-hot plate was simulated by FIDAP and its results compared for the first time.