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Properties of Pt/Cr layers due to fabrication conditions and micro hot-plate thermal characteristics [gas sensors]

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5 Author(s)
Seung Hwan Yi ; MANDO R&D Centre, Kyong, South Korea ; Suh, I.C. ; Jin, H.S. ; Kim, B.W.
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We studied the electrical and structural properties of Pt/Cr layers to fabricate the micro hot-plate for the first time. Increasing the Cr layer thickness, the sheet resistance decreased greatly. The Pt/Cr layer sheet resistance is not affected by the Cr layer thickness. When we annealed the Pt/Cr layer in Ar ambient varying the temperature from 500°C to 700°C, the sheet resistance varied from 2.026 Ω/□ to 0.6317 Ω/□. We analyzed the Pt/Cr layer properties according to the annealing conditions by XRD and AES depth profiles. We fabricated the micro hot-plate using the Pt/Cr layer by micromachining technology and measured the thermal characteristics by an IR thermo-vision system. The micro-hot plate was simulated by FIDAP and its results compared for the first time

Published in:

Semiconductor Conference, 1996., International  (Volume:1 )

Date of Conference:

9-12 Oct 1996