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Total dose effects on Microelectromechanical Systems (MEMS): accelerometers

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5 Author(s)
C. I. Lee ; Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA ; A. H. Johnston ; W. C. Tang ; C. E. Barnes
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Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers which are fabricated with surface micromachining techniques are characterized for their total dose radiation response. Different failure mechanisms were observed when the sensor element or the whole device was irradiated

Published in:

IEEE Transactions on Nuclear Science  (Volume:43 ,  Issue: 6 )