Cart (Loading....) | Create Account
Close category search window

Monolithically Integrated Two-Axis Microtensile Tester for the Mechanical Characterization of Microscopic Samples

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Muntwyler, S. ; Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich, Switzerland ; Kratochvil, B.E. ; Beyeler, F. ; Nelson, B.J.

This paper describes the first monolithically integrated two-axis microtensile tester and its application to the automated stiffness measurement of single epidermal plant cells. The tensile tester consists of a two-axis electrostatic actuator with integrated capacitive position sensors and a two-axis capacitive microforce sensor. It is fabricated using a bulk silicon microfabrication process. The actuation range is +/-16 m along both axes with a position resolution of 20 nm. The force sensor is capable of measuring forces up to +/-60 N with a resolution down to 60 nN. The position-feedback sensors as well as the force sensor are calibrated by direct comparison with reference standards. A complete uncertainty analysis through the entire calibration chain based on the Monte Carlo method is presented. The functionality of the tensile tester is demonstrated by the automated stiffness measurement of the elongated cells in plant hairs (trichomes) as a function of their size. This enables a quantitative understanding and a model-based simulation of plant growth based on actual measurement data.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 5 )

Date of Publication:

Oct. 2010

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.