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Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations

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6 Author(s)
Yoneoka, S. ; Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA ; Salvia, J.C. ; Bahl, G. ; Melamud, R.
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This letter presents a method of using electrostatic tuning to actively diminish the phase noise in a micromechanical oscillator that is caused by external vibrations. An accelerometer measures the acceleration applied to a micromechanical resonator and generates a compensation signal that is added to the bias voltage to remove the induced phase error. The proposed method achieves an 80.6% reduction of the acceleration sensitivity on average for a sinusoidal acceleration from 50 to 250 Hz with single-anchored double-ended tuning fork resonators. The rejection of phase noise due to random vibrations in the band from 15 to 80 Hz is also demonstrated.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 5 )