By Topic

Fabrication and Characterization of Micromachined Active Probes With Polymer Membranes for Biomolecular Force Spectroscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Torun, H. ; George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Sarangapani, K.K. ; Degertekin, F.L.

A micromachined polymer membrane-based active probe has been developed for biomolecular force spectroscopy. The probe has integrated but significantly decoupled electrostatic actuation and optical interferometric force sensing capabilities. Devices have been fabricated on silicon substrates using Parylene as the membrane material. The electrostatic actuator integrated into the probe could provide > 1-μm displacement with a flat response of up to 30 kHz in fluid, a feature particularly useful in fast-pulling force spectroscopy experiments involving biomolecules. The probes were successfully employed to measure the unbinding forces between biotin and streptavidin, wherein the force noise level was <;10 pN with a 1-kHz bandwidth for an 8-N/m membrane with a 25-kHz resonance frequency in fluid. This is in agreement with the thermal noise data generated by a finite-element model that predicts further improvements with simple design changes.

Published in:

Microelectromechanical Systems, Journal of  (Volume:19 ,  Issue: 5 )