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Integrity of Micro-Hotplates During High-Temperature Operation Monitored by Digital Holographic Microscopy

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10 Author(s)
Y. W. Lai ; Research Department “Integrity of Small-Scale Systems/High-Temperature Materials,”, Ruhr-Universität Bochum, Bochum, Germany ; N. Koukourakis ; N. C. Gerhardt ; M. R. Hofmann
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An investigation on the integrity of micro-hotplates using in situ digital holographic microscopy is reported. The surface topography and surface evolution of the devices during high-temperature operation (heating/cooling cycles) is measured with nanometer-scale resolution. A localized permanent out-of-plane surface deformation of 40% of the membrane thickness caused by the top measurement electrodes occurring after the first cycle is observed. The integrity-related issues caused by such a permanent deformation are discussed.

Published in:

Journal of Microelectromechanical Systems  (Volume:19 ,  Issue: 5 )