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Optical Image Analysis of the Novel Ultra-Lightweight and High-Resolution MEMS X-Ray Optics

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11 Author(s)
Mitsuishi, I. ; Dept. of Phys., Univ. of Tokyo, Tokyo, Japan ; Ezoe, Y. ; Takagi, U. ; Ishizu, K.
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We have been developing novel microelectromechanical systems X-ray optics for future satellites. It can be ultra-lightweight and of high-resolution. For the first time, we fabricated a spherical test optics made of silicon. We used the dry etching and hot plastic deformation method. We conducted imaging tests to examine whether it can focus a parallel beam of light. Visible light was selected instead of X-rays because of the convenience of testing. The focusing was confirmed with a full-width at half-maximum focal size of 2 arcmin. Since the focus is affected by optical diffraction, a smaller focus can be expected in future X-ray imaging tests.

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Quantum Electronics, IEEE Journal of  (Volume:46 ,  Issue: 9 )