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P2–13: Field emission characteristics of carbon nanotube forest on etched Si substrate

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6 Author(s)
Jungwoo Lee ; Department of Chemistry and Research Institute for Natural Science, Hanyang University, Haengdang-dong 17, Seoul 133-791, Korea ; Taehee Park ; Jongtaek Lee ; Juwon Ahn
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In this work, we investigate the field emission characteristics of carbon nanotube forest on three types substrate: (1) mirror polished, (2) chemically etched (large pattern) and (3) chemically etched (small pattern) Si substrate. The surface morphology of CNTs forest was characterized by scanning electron microscopy (SEM), surface chemical state and electronic structure phase analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy.

Published in:

International Vacuum Nanoelectronics Conference

Date of Conference:

26-30 July 2010