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Variability Analysis of TiN FinFET SRAM Cells and Its Compensation by Independent-DG FinFETs

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9 Author(s)
Endo, K. ; Nonelectronics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan ; O'uchi, S. ; Ishikawa, Y. ; Yongxun Liu
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The variability of the TiN FinFET SRAM cell performance is analyzed. It is experimentally demonstrated that the Vth-controllable independent-double-gate (IDG) FinFET technology successfully improves the variation problems in SRAM performance. As a result, the IDG-FinFET technology enables 0.5-V SRAM operation with high cell stability.

Published in:
Electron Device Letters, IEEE  (Volume:31 ,  Issue: 10 )

Date of Publication: Oct. 2010

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