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Ground subsidence is a major concern for land use planning and engineering risk assessment. This paper explores subsidence detection by the persistent scatterer (PS) interferometric synthetic aperture radar (InSAR) technique using the multitemporal high resolution spaceborne SAR images. We first describe the mathematical models and the data reduction procedures of the PS solution. The experiments of subsidence detection are then carried out over the Jinghai County in Tianjin (China) which has been sinking due to overuse of groundwater. The time series of high resolution SAR images collected by the X-band radar sensor onboard the satellite TerraSAR-X (TSX) are utilized for the PS detection, PS networking and subsidence estimation. The experimental results demonstrate that the high resolution of TSX SAR images can dramatically increase the PSs' density and coverage extent, especially in the built-up areas. Subsidence values can be extracted on the individual objects like buildings, street lamps and manhole covers, and on the linear engineering structures like the Jinghu high-speed railway. The PS InSAR with short radar wavelength (3.1 cm) is quite sensitive to ground displacement in the radar line-of-sight direction, and the derived subsidence measurements are in good agreement with the in situ data taken by optical leveling.