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Precise wavelength control for DFB laser diodes by novel corrugation delineation method

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4 Author(s)
Muroya, Y. ; Kansai Electron. Res. Lab., NEC Corp., Otsu, Japan ; Nakamura, T. ; Yamada, H. ; Torikai, T.

Precise wavelength control of a multiple-wavelength DFB InGaAsP strained MQW laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 /spl mu/m /spl lambda//4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.

Published in:

Photonics Technology Letters, IEEE  (Volume:9 ,  Issue: 3 )

Date of Publication:

March 1997

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