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Fabrication of advanced integrated optical micro-encoder chip

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4 Author(s)
R. Sawada ; Interdisciplinary Res. Labs., NTT, Tokyo, Japan ; O. Ohguchi ; K. Mise ; M. Tsubamoto

An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters

Published in:

Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on

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