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Encapsulated MEMS resonators — A technology path for MEMS into Frequency Control applications

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7 Author(s)
B. Kim ; Departments of Mechanical and Electrical Engineering, Stanford University, CA 94305, USA ; R. Melamud ; R. A. Candler ; M. A Hopcroft
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MEMS resonators have been discussed as replacements for quartz crystals in electronics timing applications for more than 40 years. The emergence of high-quality, low-cost packaging for MEMS resonators has enabled the first demonstrations of long-term stability and opened the door for commercial applications.

Published in:

2010 IEEE International Frequency Control Symposium

Date of Conference:

1-4 June 2010