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Electrostatically transduced face-shear mode silicon MEMS microresonator

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3 Author(s)
Lin, A.T.-H. ; Dept. of Eng., Univ. of Cambridge, Cambridge, UK ; Jize Yan ; Seshia, A.A.

Silicon microresonators are increasingly viewed as attractive candidates for a variety of frequency selective signal processing applications due to miniaturization and potential for integration with CMOS. In this work, we present a new electrostatically transduced face-shear (FS) mode square plate single crystal silicon resonator that rivals previously reported bulk mode resonator topologies and demonstrates good frequency scaling. A microfabricated face-shear mode resonator with 800 μm side length demonstrates a resonant frequency of 3.638 MHz, Q of 11193 in air and 836283 in vacuum as well as a TCF of -19ppm/K.

Published in:

Frequency Control Symposium (FCS), 2010 IEEE International

Date of Conference:

1-4 June 2010