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Surface acoustic wave transducers fabricated by femtosecond laser ablation

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5 Author(s)
Gertus, T. ; Laser Res. Center, Vilnius Univ., Vilnius, Lithuania ; Každailis, P. ; Rimeika, R. ; Čiplys, D.
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The fabrication of surface acoustic wave (SAW) devices by femtosecond laser micromachining has been demonstrated. The interdigital SAW transducers of 50 m wavelength were formed on YZ lithium niobate substrate by femtosecond pulse ablation of an aluminium layer. The two-port SAW device has insertion loss of 11 dB at 68 MHz. The S-parameter measurements revealed no degradation in substrate elastic, piezoelectric, and dielectric properties of the substrate due to laser processing.

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Electronics Letters  (Volume:46 ,  Issue: 17 )