Cart (Loading....) | Create Account
Close category search window
 

Design, Simulation, and Characterization of Variable Inductor With Electrostatic Actuation Fabricated by Using Surface Micromachining Technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Dong-Ming Fang ; Nat. Key Lab. of Nano/Micro Fabrication Technol., Peking Univ., Beijing, China ; Xiu-Han Li ; Quan Yuan ; Hai-Xia Zhang

In this paper, a new variable inductor with electrostatic actuators was proposed and was fabricated using surface micromachining microelectromechancal systems (MEMS) technology. The variable inductor consists mainly of planar spiral inductor, the shielding metal plate above the spiral inductor, and the electrostatic-driven capacitive actuators. In order to enhance the tuning range of the variable inductor, the shielding metal plate has adopted electroplated Ni80Fe20 Permalloy as the “magnetic core” of the variable inductor. The fabricated variable microinductor was tested and characterized. The measured results indicated that the variable inductor had good performance at high frequency and the tuning range of the variable inductor was 77.8%. The effect of Ni80Fe20 Permalloy metal plate on the inductance of variable inductor was also discussed.

Published in:

Electron Devices, IEEE Transactions on  (Volume:57 ,  Issue: 10 )

Date of Publication:

Oct. 2010

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.