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A Micromachined Nanopositioner With On-Chip Electrothermal Actuation and Sensing

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4 Author(s)
Zhu, Y. ; Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle Australia, Callaghan, NSW, Australia ; Bazaei, A. ; Moheimani, S.O.R. ; Yuce, M.R.

This letter describes the design of a micromachined nanopositioner with thermal actuation and sensing capabilities in a single chip. The positioner has a dynamic range of 14.4 m, and the sensor drift is 8.9 nm over 2000 s with a differential sensing scheme. The on-chip displacement sensing enables a feedback control capability. A proportional-integral feedback controller is designed and implemented digitally. The closed-loop step response results show a positioning resolution of 7.9 nm and a time constant of 1.6 ms.

Published in:

Electron Device Letters, IEEE  (Volume:31 ,  Issue: 10 )