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A surface micromachined capacitive pressure sensor for intraocular pressure measurement

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3 Author(s)
Katuri, K.C. ; Dept. of Mech. & Aerosp. Eng., North Carolina State Univ., Raleigh, NC, USA ; Ramasubramanian, M.K. ; Asrani, S.

In glaucoma patients, intraocular pressure (IOP) is a parameter that plays significant role in disease diagnosis and treatment. Continuous IOP measurements could help capture fluctuations in IOP that are found to be relevant to disease progression. In this paper, an implantable surface micromachined capacitive pressure sensor that can be used as a part of LC tank implant circuit is discussed. A three layer Polysilicon process was used for sensor fabrication. A preliminary study on sensor coil is also presented.

Published in:

Mechatronics and Embedded Systems and Applications (MESA), 2010 IEEE/ASME International Conference on

Date of Conference:

15-17 July 2010

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