A surface micromachined capacitive pressure sensor for intraocular pressure measurement

In glaucoma patients, intraocular pressure (IOP) is a parameter that plays significant role in disease diagnosis and treatment. Continuous IOP measurements could help capture fluctuations in IOP that are found to be relevant to disease progression. In this paper, an implantable surface micromachined capacitive pressure sensor that can be used as a part of LC tank implant circuit is discussed. A three layer Polysilicon process was used for sensor fabrication. A preliminary study on sensor coil is also presented.