Referenced Items are not available for this document.
The work presented here shows a new design for SU8 based piezoresistive accelerometer, where SU8/carbon black is used as piezoresistors. The accelerometer structure is optimized to generate maximum bending stress at the base of the beams. The structure is inherently temperature insensitive. The design of proof mass is such that the sensitivity to cross axis acceleration is kept within a limit of 4%.
Published in:
Semiconductor Electronics (ICSE), 2010 IEEE International Conference on
Date of Conference: 28-30 June 2010
- Page(s):
- 289 - 292
- Print ISBN:
- 978-1-4244-6608-5
- INSPEC Accession Number:
- 11476293
- Conference Location :
- Melaka
- Digital Object Identifier :
- 10.1109/SMELEC.2010.5549364
- Product Type:
- Conference Publications
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