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Optimum design of SU-8 based accelerometer with reduced cross axis sensitivity

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3 Author(s)
Prasenjit Ray ; Centre of Excellence in Nanoelectronics, Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai-400076, India ; V. Ramgopal Rao ; Prakash R. Apte

The work presented here shows a new design for SU8 based piezoresistive accelerometer, where SU8/carbon black is used as piezoresistors. The accelerometer structure is optimized to generate maximum bending stress at the base of the beams. The structure is inherently temperature insensitive. The design of proof mass is such that the sensitivity to cross axis acceleration is kept within a limit of 4%.

Published in:

Semiconductor Electronics (ICSE), 2010 IEEE International Conference on

Date of Conference:

28-30 June 2010