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MOSFET transistors fabricated with high permitivity TiO2 dielectrics

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7 Author(s)
Campbell, Stephen A. ; Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA ; Gilmer, D.C. ; Xiao-Chuan Wang ; Ming-ta Hsieh
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Layers of polycrystalline anatase TiO2 have been deposited through the thermal decomposition of titanium tetrakisisopropoxide (TTIP). 500 Å films deposited and annealed in oxygen at 750°C had average roughnesses (Ra) of about 30 Å. Capacitors made from 190 Å layers of TiO2 displayed a voltage dependent accumulation capacitance. This was postulated to be caused by finite width effects in the accumulation layer which we have dubbed the quantum capacitance effect. N-channel transistors made with these films showed near ideal behavior, but mobilities were significantly lower than those of thermal oxide MOSFETs. This mobility reduction was believed to be caused by interface states, which fell below 1011 cm-2 eV-1 at midgap, but rose sharply on either side, unlike the “U” shaped behavior in thermal oxide MOSFET's

Published in:

Electron Devices, IEEE Transactions on  (Volume:44 ,  Issue: 1 )

Date of Publication:

Jan 1997

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