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Fabrication of miniaturized thick-film arms for thermoelectric microgenerators

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2 Author(s)
Markowski, P. ; Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland ; Dziedzic, A.

In the paper fabrication process of miniaturized thick-film arms for metal-based thermoelectric microgenerator is presented. Ones arms were fabricated using special photoimaginable ink and photolithography processing. Second arms were screen-printed using standard ink, then laser shaped. In the result process of fabrication narrow paths for microgenerator was elaborated.

Published in:

Electronics Technology (ISSE), 2010 33rd International Spring Seminar on

Date of Conference:

12-16 May 2010

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