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Unified approach for modeling and simulation of microelectro mechanical systems (MEMs) and nano-enabled fuel cells has been proposed. A novel way to approach reliability of MEMS-enabled fuel cells is discussed incorporating recent developments and proposals. We know that reliability modeling and accurate prediction of properties in nano domains remains a major challenge where still theories are still under development. Hence accurate prediction and modeling still remains a challenging area. A direct methanol fuel cell (DMFC) has benefited maximum from progression in MEMS technologies in bringing out advances in its existing framework. The necessity of a porous membrane has been eminent in recent fuel cells, where a comprehensive computation model in this area is still not available. This need for MEMS-based models for porous silicon-based membranes based on nano imprints technology has been met by modeling it in SUGAR-MATLAB environment. MEMS technologies are explored in modeling of tubes, capillary pump, micro channels and other structures which is an emerging area for fuel cells. Finally, the reliability analysis is done to assess their application in real devices. Development of strong reliability theories backed by computational and theoretical proofs can assist in rapid commercialization of such technologies. MEMS enable fuel cells can reduce carbon emissions and provide a sustainable future based on green energy solutions.