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Design of RF Properties for Vertical Nanowire MOSFETs

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2 Author(s)
Lind, E. ; Dept. of Solid State Phys., Lund Univ., Lund, Sweden ; Wernersson, L.-E.

The RF performance of vertical nanowire metal-oxide-semiconductor field-effect transistors in realistic layouts has been calculated. The parasitic capacitances have been evaluated using full 3-D finite-element method calculations, combined with self-consistent Schrödinger-Poisson calculations for the intrinsic gate capacitances. It is shown that a performance comparable to planar FETs can be achieved in the vertical geometry by scaling the nanowire diameter and the wire-to-wire separation.

Published in:
Nanotechnology, IEEE Transactions on  (Volume:10 ,  Issue: 4 )

Date of Publication: July 2011

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