A miniaturized thermal sensor for use in Intel's microprocessors has been demonstrated in a cutting-edge purely digital process. The circuit shows nearly linear frequency dependence with temperature of 45kHz/°C. The circuit occupies 3.75 × 10-3 mm2 and consumes a current of ~700uA, which makes it suitable to be placed in array on a microprocessor to measure thermal gradients across the die.
Published in:
Circuits and Systems (ISCAS), Proceedings of 2010 IEEE International Symposium on
Date of Conference: May 30 2010-June 2 2010