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Miniaturized CMOS thermal sensor array for temperature gradient measurement in microprocessors

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2 Author(s)
Luria, K. ; Intel Corp., Yakum, Israel ; Shor, J.

A miniaturized thermal sensor for use in Intel's microprocessors has been demonstrated in a cutting-edge purely digital process. The circuit shows nearly linear frequency dependence with temperature of 45kHz/°C. The circuit occupies 3.75 × 10-3 mm2 and consumes a current of ~700uA, which makes it suitable to be placed in array on a microprocessor to measure thermal gradients across the die.

Published in:

Circuits and Systems (ISCAS), Proceedings of 2010 IEEE International Symposium on

Date of Conference:

May 30 2010-June 2 2010