Embedded displacement measuring device based on error separating technique of multi-circle overlapping three-probe method

This paper designs an embedded displacement measuring device based on error separating technique of multi-circle overlapping three-probe method. Considering the requirement of high precision and high speed of modern CNC machine, high accuracy CCD laser displacement sensor is used in the system to measure the rotating spindle, and then the device send the result to PC for further analysis by error separating software. According to the experiment, the roundness errors separated by such method are totally similar, rotation accuracy increase as rotation speed accelerated in a certain speed. All of these are realistic.