Cart (Loading....) | Create Account
Close category search window
 

Design, implementation, and assessment of a high-precision and automation measurement system for thin film resistivity

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Pan Haibin ; Dept. of Meas. & Control Technol., Jiangsu Univ., Zhenjiang, China ; Ding Jianning ; Wang Xiaofei ; Li Boquan

The paper presents the design and implementation of a novel measurement system for thin film resistivity based on four-point probe combination measurement method and virtual instrumentation technology. Interface circuit, digital output module and Keithley 2400 SourceMeter as well as computer running virtual instrumentation software, LabVIEW are involved in this system. Interface circuit is designed based on CD4052 chip, and it plays an important role in probes automatically switching between current and voltage under the control of computer running LabVIEW and digital output module hardware, NI 9401. Keithley 2400 SourceMeter is used for two times voltage measurement and Van der Pauw correction factor is calculated based on the two times measured voltages. The sheet resistance and resistivity of thin film are measured with LabVIEW for its powerful computing, data acquisition and instrument control. The results show that the designed system can meet the needs of thin film resistivity automatic measurement with a wide range, and can be characterized by high efficiency, high precision, easy control and simple operation. Based on this system measurement process for thin film resistivity has been simplified and the level of precision and automation in measurement has been improved.

Published in:

Mechanic Automation and Control Engineering (MACE), 2010 International Conference on

Date of Conference:

26-28 June 2010

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.