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Position and mass determination of multiple particles using cantilever based mass sensors

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4 Author(s)
Dohn, Søren ; Department of Microtechnology and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, DK-2800 Kongens Lyngby, Denmark ; Schmid, Silvan ; Amiot, Fabien ; Boisen, Anja

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Resonant microcantilevers are highly sensitive to added masses and have the potential to be used as mass-spectrometers. However, making the detection of individual added masses quantitative requires the position determination for each added mass. We derive expressions relating the position and mass of several added particles to the resonant frequencies of a cantilever, and an identification procedure valid for particles with different masses is proposed. The identification procedure is tested by calculating positions and mass of multiple microparticles with similar mass positioned on individual microcantilevers. Excellent agreement is observed between calculated and measured positions and calculated and theoretical masses.

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Applied Physics Letters  (Volume:97 ,  Issue: 4 )