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Monolithic n-type conductivity on low temperature grown freestanding ultrananocrystalline diamond films

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3 Author(s)

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We report monolithic n-type conductivity on low-temperature (<570 °C) grown ultrananocrystalline diamond (UNCD) films by Li-diffusion (about 255 nm) from LiNbO3 substrates. Low resistivity of 1.2 Ω cm with carrier concentration of -2×1020 cm-3 is obtained on freestanding UNCD films. The films bonded to Cu-tape show very low turn-on field of 4.2 Vm with emission current density of above 0.3 mA/cm2 at a low applied filed of 10 Vm. The n-type conductivity of low-temperature Li-diffused UNCD films overwhelms that of the high-temperature (≥800 °C) nitrogen doped ones and will make a significant impact to diamond-based electronics.

Published in:
Applied Physics Letters  (Volume:97 ,  Issue: 4 )

Date of Publication: Jul 2010

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