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Overall performance improvement in GaAs MSM photodetectors by using recessed-cathode structure

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4 Author(s)
Rong-Heng Yuang ; Dept. of Electr. Eng., Nat. Central Univ., Chung-Li, Taiwan ; Jia-Lin Shieh ; Jen-Inn Chyi ; Jyh-Shin Chen

We report the experimental work on the GaAs metal-semiconductor-metal photodetectors with recessed cathode and/or anode. The recessed-cathode detectors exhibit much superior dc and speed performance to the conventional one because of the enhancement of hole transport in this structure. Full-width at half-maximum and fall time of the temporal response were measured to be 21 and 13 ps at 5 V bias on a 50×50 μm2 detector with a finger width and spacing of 3 μm.

Published in:

Photonics Technology Letters, IEEE  (Volume:9 ,  Issue: 2 )