By Topic

Microelectromechanical systems: interfacing electronics to a non-electronic world

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Wise, K.D. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Microelectromechanical systems (MEMS) merging integrated sensors, microactuators, and low-power electronics are rapidly growing in sophistication. Projection displays, IR/thermal imagers, print heads, microphones, accelerometers and gyros are all emerging based on this technology. Using embedded microprocessors, complete microsystems employing self-testing and digital compensation promise to achieve levels of reliability and accuracy previously impossible at low cost. Sensors for advanced semiconductor process tools, modules for distributed environmental monitoring, inertial-grade navigation aids, advanced security systems, and mass storage devices are a few of the applications being targeted. The technology choices, device structures, applications, and tradeoffs in this area are examined in this paper along with future challenges.

Published in:

Electron Devices Meeting, 1996. IEDM '96., International

Date of Conference:

8-11 Dec. 1996