Referenced Items are not available for this document.
We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3λ/2 to obtain negligible surface displacement. In the same way, the ZnO thickness for a fixed value of AlN thickness at 2λ must be larger than λ/4 to confine the acoustic wave. The electromechanical coupling of the wave presents an optimum around λ/2 for the ZnO layer thickness. A first experimental AlN/ZnO/diamond device has been developed and shows the WLAW at 412 MHz.
Published in:
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on
(Volume:57
,
Issue:
8
)
Date of Publication: August 2010
- Page(s):
- 1818 - 1824
- ISSN :
- 0885-3010
- INSPEC Accession Number:
- 11494022
- Digital Object Identifier :
- 10.1109/TUFFC.2010.1620
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 29 July 2010
- Issue Date :
- August 2010
- Sponsored by :
- IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society
- PubMed ID :
- 20679010
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