Cart (Loading....) | Create Account
Close category search window
 

Nanosmoothing of single crystal diamond chips by 1 keV Ar+ ion bombardment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Nagase, Takashi ; Department of Applied Electronics, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan ; Kato, Hiroyuki ; Pahlovy, S.A. ; Miyamoto, Iwao

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.3298885 

In this article the authors have studied the smoothing of diamond chips by irradiating them with 1 keV Ar ion beam at ion incident angles of 0°, 30°, 45°, 60°, and 80° with ion doses from 3.4×1018 to 6.8×1018 ions/cm2. They found that using ion dose of 6.8×1018 ions/cm2 at incident angles from 0° to 45°, the unprocessed surface (rms=0.14–1.2 nm) turned into ultrasmooth processed surface (rms=0.1 nm). Their results also confirmed the formation of ripples on diamond surface when the surface was irradiated with 1 keV Ar+ ion at incident angles of 60°–80°. They have also discussed the mechanism of smoothing and roughening of the surface by employing Bradley and Harper model and equations. These studies led to the understanding of the role of induced viscous flow in the smoothing process. Therefore, by choosing right conditions, 1.0 keV Ar+ ion beam machining can be employed to make diamond tools with nanofinished surface without any ripple effect.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:28 ,  Issue: 2 )

Date of Publication:

Mar 2010

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.