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This paper introduces an efficient optimization technique, based on the physical model of a spiral inductor as well as the particle swarm optimization (PSO) algorithm, to radio frequency (RF) spiral inductors. Under fixed technology parameters and the working frequency, the PSO is used to determine the maximum quality factor (Q) of the spiral inductor. It is found that our results are not only in agreement with those of the Q-value lines, with the relative error within 1.25%, but also in agreement with those of the 3D electromagnetic simulation software, with the relative error within 2.80%. The simulation experiments have shown that the new technique can yield sufficient accuracy and efficient computation.